Energy dependence of He-ion-induced tungsten nanofuzz formation at non-normal incidence angles

•He nanofuzz formation on tungsten is investigated for non-normal incidence angles.•Incident-ion-induced displacement damage in He nanofuzz formation is explored.•MD results of near-surface energy thresholds for displacement damage are presented.•Below ∼420eV, fuzz growth is not affected by incident He ion beam direction.•Above 500eV, fuzz grows toward non-normally incident He ion beams.