Wafer-Scale High-Resolution Patterning Of Biostructures Using Silk Light Chain Protein Photolithography

We report on wafer-scale high resolution patterning of bio-microstructures using silk fibroin light chain (Lfibroin) as the photoresist material. The L-fibroin fragments with the well-defined molecular weight have been successfully isolated from the integral silk fibroins consisting both heavy and light chains. Under facile biochemical modification, the L-fibroin photoresist can be synthesized via conjugating commercial photocrosslinkers as crosslinking sites in the presence of ultraviolet light. The enhanced patterning resolution, the improved etching selectivity and the inherent biocompatibility of such protein-based photoresist provide opportunities in large scale biocompatible functional microstructures manufacturing.