Effects of nitrogen doping in 4H-SiC by laser ablation of a SiN x film and its diffusion mechanism Ryota Kojima,Hiroshi Ikenoue, Masaru Suwa,Akihiro Ikeda,Daisuke Nakamura,Tanemasa Asano,Tatsuo OkadaThe Japan Society of Applied Physics(2016)引用 23|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要