An Advanced 2.5-D Heterogeneous Integration Packaging for High-Density Neural Sensing Microsystem

IEEE Transactions on Electron Devices(2017)

引用 16|浏览45
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摘要
In the traditional neural sensing microstructure, the limited metal line pitch and the metal layer numbers restrict the neural signal routing ability from electrodes to circuit chips. Miniature packaging and excessive noise interference bottlenecks are some of the challenges faced by the electrodes and circuit chips integration with traditional wire bonding. This paper proposes a 2.5-D heterogeneo...
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关键词
Through-silicon vias,Electrodes,Biosensors,Etching,Packaging,Bonding
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