An On-Chip Electromagnetic Bandgap Structure with ESD Protection for Noise Suppression in 16-nm FinFET CMOS

By using periodical electromagnetic bandgap (EBG) structure, a wideband band-stop filter (BSF) with ESD protection is first realized in 16-nm FinFET CMOS technology for GHz-order noise suppression. The proposed EBG unit cell consists of an on-chip inductor in series with MOS capacitors and gated ESD diodes. The gated ESD diodes are not only used as ESD protection devices, but also co-designed with...