Nanomanipulation of single nanowires on structured surfaces fabricated by laser interference lithography
2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)(2016)
摘要
Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.
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关键词
nanomanipulation,laser interference lithography,scanning electron microscope,fringe pattern
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