On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach
Journal of Microelectromechanical Systems(2017)
摘要
The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presen...
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关键词
Probes,Sensors,Micromechanical devices,Electrostatic actuators,Fabrication,Heat sinks
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