On the Nature of Emitter Diffusion and Screen-Printing Contact Formation on Nanostructured Silicon Surfaces

In this paper, we study the impact of change in emitter diffusion profiles on the electrical characteristics of nanotextured surfaces formed by an inline plasma-less dry-chemical etching process. Our experimental results and process simulations suggest that a deeper highly doped region and a significantly higher inactive P concentration in the emitter plays a determining role in defining recombina...