200mm Silicon photonic platform suitable for high performance computing applications

Bertrand Szelag,M. A. Seyedi,S. Malhouitre, B. Blampey,Antoine Descos,Chin-Hui Chen, S. Brision,P. Brianceau,Marco Palo Alto Fiorentino,R. G. Beausoleil,C. Kopp

2016 IEEE 13th International Conference on Group IV Photonics (GFP)（2016）

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摘要

A new silicon photonic platform on 310nm thick SOI wafers is presented. Process and layout optimizations for P-i-N ring modulators are described.

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关键词

silicon photonic platform,high performance computing applications,SOI wafers,process optimization,layout optimization,P-i-N ring modulators,size 310 nm

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