Method to Determine the Root Cause of Low- $\kappa$ SiCOH Dielectric Failure Distributions

Low-κ SiCOH reliability is a growing concern for integrated circuit reliability. An important consideration for product qualification involves the accurate extrapolation to the low percentile failures based on the results from a group of samples. A method is presented to determine the root cause of failure distributions amongst a group of dielectric samples using voltage ramp data. Samples' leakag...