Terahertz Metamaterial Absorbers Implemented in CMOS Technology for Imaging Applications: Scaling to Large Format Focal Plane Arrays

Ivonne Escorcia Carranza,James Grant,John Gough,David R. S. Cumming

IEEE Journal of Selected Topics in Quantum Electronics（2017）

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摘要

We present the design and fabrication of terahertz (THz) metamaterial (MM) absorbers and their monolithic integration into a commercial CMOS technology along with its respective readout electronics to produce a low-cost, uncooled, and high resolution THz camera. We first describe the work done on single band and broadband MM absorbers on custom substrates, then progress with a description of the i...

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关键词

Absorption,Detectors,Broadband communication,Imaging,Silicon,Metamaterials,CMOS process

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