Ideal Scan Path for High-Speed Atomic Force Microscopy

IEEE/ASME Transactions on Mechatronics(2017)

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摘要
We propose a new scan waveform ideally suited for high-speed atomic force microscopy. It is an optimization of the Archimedean spiral scan path with respect to the X,Y scanner bandwidth and scan speed. The resulting waveform uses a constant angular velocity spiral in the center and transitions to constant linear velocity toward the periphery of the scan. We compare it with other scan paths and dem...
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关键词
Spirals,Force,Atomic force microscopy,Image resolution,IEEE transactions,Mechatronics
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