Excitation of silicon microspheres resonances with femtosecond laser fabricated glass waveguides

Optical waveguides were fabricated with femtosecond pulsed lasers on glass and characterized by transmission measurements. Glass waveguides were later used for excitation of the whispering gallery modes in a silicon microsphere. The coupling between the silicon microsphere and the femtosecond laser inscribed optical waveguide was simulated in both 90 degrees elastic scattering and 0 degrees transmission spectra. The silicon microsphere whispering gallery modes are available for both in the transverse electric and transverse magnetic polarizations with a spectral mode spacing of 0.25 nm. Optical resonances on silicon microsphere integrated with femtosecond laser written optical waveguides may lead to future quantum optical communication devices.