A Wide-Angle Immersed Mems Mirror And Its Application In Optical Coherence Tomography

In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the "Snell's Window" effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32 degrees field of view (FOV) can be increased up to about 75 degrees. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.