Wet-chemical etching of SrMoO3 thin films

Arzhang Mani,Mohammad Nikfalazar,Falk Muench,Aldin Radetinac,Yuliang Zheng,Alex Wiens,Sergiy Melnyk,Holger Maune,Lambert Alff,Rolf Jakoby,Philipp Komissinskiy

Materials Letters（2016）

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摘要

SrMoO3 is a perovskite oxide material with very high electrical conductivity, exhibiting great potential for integration into electronic devices. Here, we present a method for controlled wet-chemical etching of SrMoO3 thin films using alkaline solutions. The etching process includes superficial oxidation of the Mo4+ of the SrMoO3 to Mo6+ followed by solvation of the molybdate and strontium ions. The SrMoO3 etching rate can be widely tuned by adjusting the amount of the oxidizing additives in the solution.

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关键词

SrMoO3,Molybdate,Thin films,Wet chemical etching,Electronic materials

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