Thermal Shock Behavior of TiN Coating Surface by a Pulse Laser Ablation Method

KOREAN JOURNAL OF METALS AND MATERIALS(2012)

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摘要
Thermal shock behavior of TiN-coated SUS 304 substrate was investigated using a laser ablation method. By short surface ablation with a pulse Nd-YAG laser, considerable surface crack and spalling were observed, whereas there were few oxidation phenomena, such as grain growth of TiN crystallites, nucleation and growth of TiO2 crystallites, which were observed from the coatings quenched from 700 degrees C in a chamber. The oxygen concentration of the ablated coating surface with the pulse laser also had a lower value than that of the quenched coating surface by Auger electron spectroscopy and electron probe micro analysis. These results were attributed to the fact that the properties of the pulse laser method have a very short heating time and so the diffusion time for oxidation was insufficient. Consequently, it was verified that the laser thermal shock test provides a way to evaluate the influence of the thermal shock load reduced oxidation effect.
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thin films,thermo-mechanical processing,surface oxidation,auger electron spectroscopy,pulse laser ablation method
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