A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation
IEEE Sensors Journal（2016）
摘要
This paper presents a microelectromechanical systems (MEMS)-based energy harvester that is designed to harvest electrical energy from an external source of ultrasonic waves. The harvester features a novel 4-degree-of-freedom (DOF) mechanical design that uses three translational resonance modes and one rotational mode, with electrostatic transducers being implemented to perform the conversion of me...
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关键词
Micromechanical devices,Acoustics,Transducers,Electrostatics,Batteries,Electrodes,Energy harvesting
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