RF MEMS Zipping Varactor With High Quality Factor and Very Large Tuning Range

Suan Hui Pu, David A. Darbyshire,Robert V. Wright,Paul B. Kirby,Mihai Rotaru,Andrew S. Holmes,Eric M. Yeatman

IEEE Electron Device Letters（2016）

引用 12|浏览11

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摘要

An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold electrodes to ensure a low series resistance, the high quality factors of 317 and 63 at 1 GHz were measured for the minimum and maximum capacitances, respe...

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关键词

Varactors,Tuning,Capacitance,Transmission line measurements,Voltage measurement,Radio frequency,Q-factor

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