The development of InGaAs short wavelength infrared focal plane arrays with high performance

•The typical linear FPAs and 320×256, special sizes 512×256 FPAs with 0.9–1.7μm wavelength were obtained.•The average peak detectivity of the FPAs with 0.9–1.7μm wavelength are superior to 3×1012cmHz1/2/W.•The dark current of InGaAs detectors with 0.9–2.5μm wavelength decreases to about 10nA/cm2 at 200K.•The average peak detectivity of the FPAs with 0.9–2.5μm wavelength is superior to 5×1011cmHz1/2/W.•The targets are sharply imaged by the 320×256 FPAs and 512×1 FPAs.