A Multistep DRIE Process for Complex Terahertz Waveguide Components
IEEE Transactions on Terahertz Science and Technology（2016）
关键词
Deep reactive-ion etching (DRIE),orthomode transducer (OMT),silicon dioxide (SiO2),silicon micromachining,submillimeter waves,terahertz (THz)
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要