Direct Observation of Tensile Stress in Silicon Oxide Films using Cathodoluminescence SpectroscopyShigeru Kakinuma,Kentaro Nishikata,Naoaki Yamashita,Nobuyuki Naka,Shinsuke Kashiwagi,K. Matsumoto,Takahiro Namazu,Shozo InoueThe Japan Society of Applied Physics(2008)引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要