AFD-based model of EM lifetime and reservoir effect
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)(2016)
摘要
We propose and experimentally validate an AFD (atomic flux divergence)-based MTTF (mean time to failure) model for wires with EM. We analyze traditional MTTF models and compare them to the proposed model. We use the AFD-based compensation model to quantitatively capture the reservoir effect and provide a relationship between the reservoir's volume and EM lifetime enhancement.
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关键词
AFD,electromigration,lifetime,model,reservoir
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