Hybrid Gate Structures of NMOS : Poly-Si / PMOS : 2 Layers Ni-FUSI by using Flash Lamp Anneal (FLA) and CMPHiroyuki Ohta,S. Akiyama,H. Fukutome, K. Ookubo,Kazuo Kawamura, N. Idani,S. SatohThe Japan Society of Applied Physics（2008）引用 0|浏览4暂无评分关键词nmos,pmos,flash lamp anneal,gate,ni-fusiAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
