Surface characterization of diamond film tool grinding on the monocrystal sapphire under different liquid environments

Wei Feng,Wenzhuang Lu,Hai Zhou,Bin Yang,D. W. Zuo

Applied Surface Science（2016）

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摘要

•Tribological properties of diamond film tool are related to the liquid environment of grinding.•Friction coefficient of diamond film tool under 3% ethylenediamine exhibited the minimum.•Friction coefficient of diamond film tool under H2O exhibited the maximum.•A better surface quality of sapphire under ethylenediamine can be obtained.

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关键词

Diamond film tool,Tribological property,XPS,Grind,Sapphire wafer

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