Spatial pattern analysis of process variations in silicon microring modulators

Rui Wu,Chin-Hui Chen,Tsung-Ching Huang,R. G. Beausoleil,Kwang-Ting Cheng

2016 IEEE Optical Interconnects Conference (OI)（2016）

引用 5|浏览33

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摘要

We identified significant spatial patterns in the wafer-scale process variation data of silicon microring modulators. These spatial patterns implicate some variation sources in certain fabrication process steps.

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关键词

Process variation,silicon photonics,microring modulator

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