Implantation through HfO 2 : Calibration of Simulation and Study on Hf Behavior during Implant

Jyotshna Bhandari, P. Rivallin,M. Vinet,Thierry Poiroux,J.P. Barnes,Bernard Previtali, Simon Deleonibus, Adrian M. Ionescu

The Japan Society of Applied Physics(2008)

引用 0|浏览7
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要