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Hybrid Dielectric Thin Films on Flexible Substrates for Embedded Capacitor Applications

Dipankar Ghosh,Stephen P. Maki,Christopher Lyons,Steven D. Theiss, Robert R. Owings

IEEE Transactions on Components Packaging and Manufacturing Technology（2016）

Cited 8|Views8
Key words
Dielectrics,embedded capacitors,polymer multilayer (PML),RF sputtering,thin films,vapor deposition,zirconia
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