Metal/Insulator/Semiconductor contacts for ultimately scaled CMOS nodes: Projected benefits and remaining challenges

Julien Borrel,Louis Hutin,Helen Grampeix,Emmanuel Nolot, Magali Tessaire,Guillaume Rodriguez,Yves Morand,Fabrice Nemouchi,Magali Gregoire,Emmanuel Dubois,M. Vinet

2016 16th International Workshop on Junction Technology (IWJT)（2016）

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摘要

In this paper, some key fundamental aspects of Metal / Insulator / Semiconductor contacts as well as practical issues occurring with their implementation are reviewed in order to fully comprehend the opportunities and limitations of this approach.

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关键词

metal-insulator-semiconductor contacts,CMOS nodes

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