A Twin FBG Probe and Integration With a Microhole-Measuring Machine for the Measurement of Microholes of High Aspect Ratios

To enhance the precision manufacture of the microholes of high aspect ratios, a fiber Bragg grating (FBG) probe with a twin fiber structure based on capillary-driven self-assembly fabrication method is developed for a micro-hole-measuring machine to do the high-precision measurement. The sensing principle of the twin FBG probe is investigated through analyzing the strain distribution within the pr...