Laser processing in 3D diamond detectors

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment(2017)

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摘要
A technique for electrode production within diamond using a femtosecond laser system is described. Diagnosis tests to quantify the stress, the diamond to graphite ratio, and the resistivity of these electrodes are discussed. A 3D electronic grade single crystal diamond detector produced using this technique is shown, and the electrodes have a resistivity of O(1Ωcm). An improvement to the technique through the use of an adaptive wavefront shows a reduction of the diamond to graphite ratio, and smaller, higher quality electrodes were manufactured.
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关键词
3D diamond detectors,Laser graphitisation of diamond,Single crystal diamond
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