A sampling approach for efficient BEOL TDDB assessment

Andrew Kim
Andrew Kim
Cathryn Christiansen
Cathryn Christiansen

international integrated reliability workshop, pp. 52-55, 2015.

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Abstract:

As semiconductor manufacturing process becomes increasingly complex in advanced technologies, time-to-fail characteristics of BEOL TDDB are often significantly affected by within-wafer process variations, especially in early development stages. With the presence of such an effect, an accurate estimation of TDDB model parameters becomes di...More

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