Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications

Recent results of properties and performance of WO_3 gas sensing layers produced by industrial picosecond pulsed laser deposition process developed by Picodeon Ltd Oy are presented in this paper. WO_3 layers with controllable porosity and nanostructure were successfully deposited on commercial sensor platforms, and basic measurements to characterize their performance as gas sensors gave promising results.