Tempe Ture-Drift Rejection And Sensitivity To Mismatch Of Synchronized Strongly-Coupled M/Nems Resonators

This paper describes a strongly-coupled resonant architecture in which two M/NEMS resonators are synchronized through their actuation voltage. In the context of a sensing application, this architecture theoretically enables environmental drift rejection (e.g. temperature. humidity) and ultra-sensitive measurement by monitoring a phase difference rather than a frequency. Experiments prove the efficiency of the proposed scheme, with respect to temperature-drift rejection and sensitivity to mismatch.