High- $Q$ UHF Spoke-Supported Ring Resonators

A vibrating micromechanical spoke-supported ring resonator employing a central peg-anchor, balanced non-intrusive quarter-wavelength extensional support beams, and notched support attachments attains high Q-factor in vacuum, posting 10000 at 441 MHz when made of polysilicon structural material and 42900 at 2.97 GHz when made of microcrystalline diamond. The latter marks the highest f · Q of 1.27×1...