Synthesis of Diamond Nanoplatelets/Carbon Nanowalls on Graphite Substrate by MPCVD

Zhang Wei,Lyu Jilei,Lin Xiaoqi, Zhu Jinfeng,Man Weidong,Jiang Nan

PLASMA SCIENCE & TECHNOLOGY(2015)

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摘要
The films composed of carbon nanowalls and diamond nanoplatelets, respectively, can be simultaneously formed on graphite substrate by controlling the hydrogen etching rate during microwave plasma chemical vapor deposition. To modulate the etching rate, two kinds of substrate design were used: a bare graphite plate and a graphite groove covered with a single crystal diamond sheet. After deposition at 1200 degrees C for 3 hours, we find that dense diamond nanoplatelets were grown on the bare graphite, whereas carbon nanowalls were formed on the grooved surface, indicating that not only reaction temperature but also etching behavior is a key factor for nanostructure formation.
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关键词
etching,nanostructures,diamond,nanomaterials
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