Development of III-Sb metamorphic DBR membranes on InP for vertical cavity laser applications

Journal of Crystal Growth(2016)

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摘要
Sb-based metamorphic DBR membranes are developed for InP-based vertical cavity laser applications. The reflectivity of the metamorphic DBR membrane is compared to the reflectivity of a lattice-matched DBR to characterize the optical quality of the DBR membrane. The metamorphic interface between InP and the III-antimonides is found to degrade the reflectivity of the DBR. Therefore, the growth temperature for the metamorphic DBR is optimized in order to obtain highly reflective (>99.8%) III-Sb thin-film membranes.
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关键词
B3. Dielectric Bragg reflectors,B2. Semiconducting III–V materials,A3. Molecular beam epitaxy,A1. Metamorphic interfaces
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