Planarized Fabrication Process with Two Layers of SIS Josephson Junctions and Integration of SIS and SFS Π-Junctions
IEEE Transactions on Applied Superconductivity（2019）
关键词
Josephson device fabrication,Nb/AlOx/Nb junctions,Nb/Ni/Nb junctions,pi-junctions,SFS junctions,SFQ electronics,superconducting device fabrication,superconducting electronics,superconducting electronics fabrication
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