Kink Suppression And High Reliability Of Asymmetric Dual Channel Poly-Si Thin Film Transistors For High Voltage Bias Stress

Asymmetrically designed polycrystalline silicon (poly-Si) thin film transistors (TFT) were fabricated and investigated to suppress kink effect and to improve electrical reliability. Asymmetric dual channel length poly-Si TFT (ADCL) shows the best reduction of kink and leakage currents. Technology computer-aided design simulation proves that ADCL can induce properly high voltage at floating node of the TFT at high drain-source voltage (VDS), which can mitigate the impact ionization and the degradation of the transconductance of the TFT showing high reliability under the hot carrier stress.