Electropulsing-Induced Microstructural Changes and Their Effects on Electrical Conductivity of Thin Films of an Al-doped ZnO

Electropulsing-induced phase decompositions and microstructural changes in AZO-5 thin films were studied by X-ray diffraction, scanning electron microscopy, atomic force microscopy, Hall effect measurement and photoluminescence (PL) measurement techniques. It was found that the electropulsing induced phase decomposition started with spinodal decomposition, which was accompanied by discontinuous precipitation in the AZO-5 thin films. Both circular phase decompositions and the crystal orientation occurred. Inappropriate electropulsing might damage zones, which resulted in tremendous decrease in electrical conductivity. Circular changes in both the peak position and the width of the PL wavelength were observed in the EPT AZO-5 thin films. Formation of zones favored reducing the roughness of the thin film.