2. 7" a-Si TFT Array

The fabrication and performances of a-Si TFT array have been studied. The TFT’ s active layers were prepared in a separated con secutive four-chamber PECVD system with high vacuum and fast changing-gas rate. The panel consists of 196 × 144 pixels and the TFT switches with W/L= 10 are incluede. The typical performaces of TFT’ s have been shown. We assembled some TFT-LCD samples using above TFT array and normal TNLC material. The TFT-LCD is driven under pseudo-dynamic condition and the display of pictures can be controlled by PC commands.