In lens BSE detector with energy filtering.

Tomáš Radlička,Marek Unčovský,Martin Oral

Ultramicroscopy（2018）

引用 8|浏览9

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摘要

•High pass energy filtering of back-scattered electron image in SEM.•Optimization of filtration grid transmisivity.•Increasing resolution for biological samples.•Suppression of the SE signal in the beam deceleration mode.

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关键词

Electron optics,Scanning electron microscopy,Back scattered electrons,Energy filtering

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