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Self-Anchored Catalyst Interface Enables Ordered Via Array Formation from Submicrometer to Millimeter Scale for Polycrystalline and Single-Crystalline Silicon

Jeong Dong Kim,Munho Kim,Lingyu Kong,Parsian K. Mohseni,Srikanth Ranganathan,Jayavel Pachamuthu,Wai Kin Chim,Sing Yang Chiam,James J. Coleman,Xiuling Li

ACS Applied Materials and Interfaces（2018）

Cited 26|Views18
Key words
high aspect ratio,polycrystalline silicon via,MacEtch,self-anchored catalyst,through-Si-via
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