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Measurement of the Height of Nanorelief Elements by the Method of Three-Dimensional Reconstruction in a Scanning Electron Microscope

S. A. Darznek,D. A. Karabanov,A. Yu. Kuzin,V. B. Mityukhlyaev,P. A. Todua,M. N. Filippov

Measurement Techniques（2017）

Cited 0|Views12
Key words
three-dimensional reconstruction,scanning electron microscope,relief structure,profilometer
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