High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated Electronics Design.

Paolo Minotti,Stefano Dellea,Giorgio Mussi,Andrea Bonfanti,Stefano Facchinetti,Alessandro Tocchio,Valentina Zega,Claudia Comi,Andrea Leonardo Lacaita,Giacomo Langfelder

IEEE Transactions on Industrial Electronics（2018）

引用 55|浏览37

暂无评分

摘要

This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 μA), low-phase-noise integrated circuit is designed specifically for frequencymodulated operation. Both yawand pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures ...

查看译文

关键词

Frequency modulation,Resonant frequency,Gyroscopes,Sensors,Force,Micromechanical devices,Resonators

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要