High-efficiency detector of secondary and backscattered electrons for low-dose imaging in the ESEM.

Ultramicroscopy(2018)

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摘要
•A new combined detector of SE and BSE with very high detection efficiency for the ESEM.•Proof of concept for detection of energy-separated SE using the ISEDS in the ESEM.•Low-dose imaging of non-coated low atomic number samples in a gaseous environment.•The strategy for deep-sensitive imaging in non-coated low Z samples in the ESEM.•Performance of the improved scintillation BSE detector for electron microscopy.
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关键词
Detectors,Scintillators,Low-dose imaging,Energy filtration,MC simulations
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