Fast WAT test structure for measuring Vt variance based on latch-based comparators
VTS, pp. 1-6, 2017.
As the technology of IC manufacturing continually scales down, process variations become more and more crucial than before. To statistically characterize local process variations, the traditional array-based test structure measures threshold voltage (Vt) for a sufficiently large number of devices-under-test (DUTs). However, the array-base...More
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