Fabrication and simulation of electrically reconfigurable dual metal-gate planar field-effect transistors for dopant-free CMOS

2017 12th International Conference on Design & Technology of Integrated Systems In Nanoscale Era (DTIS)(2017)

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摘要
In this paper, we illustrate by simulation and extend our previous work by demonstration of fabricated devices of electrostatically doped, reconfigurable planar field-effect-transistors with dual work function metal gates. The technological cornerstones for this dual-gated general purpose FET contain Schottky S/D junctions on a silicon-on-insulator substrate. The transistor type, i.e. n-type or p-type FET, is electrically selectable in operation by applying a control-gate voltage which significantly increases the versatility and flexibility in the design of digital integrated circuits.
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关键词
ambipolar,voltage-programmable,reconfigurable,RFET,electrostatic doping,SOI
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