Sonochemical synthesis of hydrogenated amorphous silicon nanoparticles from liquid trisilane at ambient temperature and pressure.

•A new synthesis for hydrogenated amorphous silicon nanoparticles is demonstrated.•The procedure is carried out in N2 atmosphere at temperatures between 10 and 40°C.•Particle size is tunable via the sonotrode tip amplitude or solution concentration.•Sustained sonication yields nanoporous large specific surface area agglomerates.•Particles of 1.5–50nm in size are prepared and selected properties are analyzed.