Influence of Si atoms on the structure and electronic properties of amorphous DLC films

The paper considers the effect of silicon on the formation of the structure and properties of amorphous diamond-like carbon (DLC) films. Thin films of silicon-modified amorphous diamond-like carbon (DLC:Si) were synthesized by magnetron ion-plasma co-sputtering of a combined target. Studies of the structure and properties of amorphous DLC:Si films were carried out in the range of silicon concentrations up to 6.75 at.%. A change in the formation of the film structure is shown using atomic force microscopy (AFM) and transmission electron microscopy (TEM). Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS) revealed a significant change in the local structure of amorphous DLC:Si films. Which, in turn, leads to a change in the density of states of π-electrons in the band and, as a rule, to a change in the electronic properties.