Position Error Correction Of Large-Aperture Aspherical In-Position Measurement

An improved mathematical model of aspherical in-position measurement calibration is proposed in this paper, including hardware and software methods. The hardware method is used in rough calibration, but it is not precise enough. Then, the software method is chosen to further reduce the error. Simulation experiments are performed to demonstrate the effectiveness of this improved approach. Lastly, the model is verified through the testing of a concave aspheric surface. The experiment results show that the measurement errors of mirror after data processing can be reduced about 2 mu m. Published by AIP Publishing.